Synthesis method for position controllable transition metal dichalcogenide
Avoid size dispersion, able to synthesize single crystal
Overview
Transition metal dichalcogenide (hereinafter “TMD”) is an atomic
material layer with thickness of an atom, which has a bandgap in
the visible range and behaves as a semiconductor. The
conventional synthesis method is the chemical vapor deposition
(CVD) where TMD is synthesized at random position on the
circuit board. The position control of the synthesis is essential in
order to apply TMD on different devices but the conventional
synthesis method doesn’t allow that. The synthesis method with
controlled position is also proposed but a polycrystalline TMD is
synthesized and it is not convenient to apply to different devices.
This invention solves above issues and can provide a synthesis
method of monocrystalline TMD or heterojunction TMD by
controlling its position using micro dots as a growing core while
limiting the size dispersion.
Product Application
・Application to different devices using TMD
・Next generation semiconductor device material
・Schottky type solar cell
Related Works
[1] Sci. Rep. 11 (2021) 22285
[2] Sci. Rep. 9 (2019) 12958
IP Data
IP No. : JP6660203
Inventor : KATO Toshiaki, KANEKO Toshiro
keyword : TransitionMetalDichalcogenide, TMD,Solarcel, NextGeneration, Semiconductor, CVD, PositionControllableSynthesize, LargeSingleCrystal