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Tohoku Univ. Technology
Admin No.T17-099

Electrostatic MEMS Speaker

High sound quality and Anti-dust, water etc.

Overview

 As a acoustic speaker, a dynamic speaker using electromagnetic force (electrodynamic speaker) is used in many cases. In the dynamic speaker, as strong force is required, regarding a small speaker such as an earphone, in particular, the inertial force of the diaphragm is increased relatively, causing a problem of increased deviation between the electrical signal and the vibration.
 An electrostatic speaker has been used to solve the foregoing problem. However, in the conventional electrostatic speakers, one or a plurality of holes is required to be formed at each fixed electrode in order to transmit an acoustic wave generated by the vibration of the diaphragm to the outside.This causes a problem that dust, water, moisture, etc. are likely to come in. This invention solves mentioned problems by its new structure.

Electrostatic MEMS Speaker

Completely-sealed structure from the outside

Electrostatic MEMS Speaker

Product Application

・Electrostatic Speaker

Related Works

Please contact for detail. No public paper available.

IP Data

IP No.  : WO2020/174524
Inventor : JOERG FROEMEL, TANAKA Shuji TANAKA, OHTAKA Koichi
keyword : electrostaticspeakser, mems, memsspeaker







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