Q factor trimming for Oscillator

adjust the Q factor of multiple orthogonal modes

Overview

Although the Q factors of the 2D oscillator used in gyroscope must be matched in the x and y axial directions, they may differ slightly due to manufacturing error, etc. Thus, Q factor in each x and y axial direction needs to be matched independently. In a oscillator, vibration generates heat flow which affects the Q factor (thermoelastic loss). Therefore, it is possible to adjust the Q factor by adding a heat flow path in the structure or by blocking the heat flow.
The 2D oscillator of this invention has a pre-fabricated machinable part to control the heat flow without changing significantly the stiffness, in addition to its basic structure. The Q factors in the 1^st and 2^nd modes, which are orthogonal to each other, can be controlled independently by cutting this machinable part appropriately.

Example of gyroscope configuration

Product Application

・Oscillator used in gyrosensor

Related Works

[1] A. Hamza, T. Tsukamoto and S. Tanaka, "Quality Factor Trimming Method Using Thermoelastic Dissipation for Ring-Shape MEMS Resonator," in Proc. 2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL), 2020, pp. 1-4.

IP Data

IP No.　 ： JP2019-195011
Inventor ： TSUKAMOTO Takashiro, TANAKA Shuji
keyword ： mems, gyrosensor, magneticsensor, pressuresensor